I was building some new servers in my lab for an Exchange 2013 test and found out one of them out of space by the next day after installation. I start looking into where the files could be and I found 60GB of temp and dump files in the c:windowstemp folder. So If you ever experience this error. Check your C:WindowsTemp folder.
I think that because the CAS server did not have enough memory the processes where crashing.